Sensor applications of thermoelectric thin films

被引：2

作者：

van Herwaarden, S ^{[1
]}

机构：

[1] Xensor Integrat, NL-2601 DE Delft, Netherlands

来源：

PROCEEDINGS ICT'97 - XVI INTERNATIONAL CONFERENCE ON THERMOELECTRICS | 1997年

关键词：

D O I：

10.1109/ICT.1997.666973

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

This paper describes state of the art in thermal micro-sensors, as fabricated using thin-film and silicon technology. After defining thermal sensor types, the major thermal sensors are described. It also considers the physical and thermal effects on which the sensor action is based, and gives an introduction in the technology and design methodology of present day thermal micro-sensors.

引用

页码：47 / 55

页数：9

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