MICROSCALE THREE-DIMENSIONAL HEMISPHERICAL SHELL RESONATORS FABRICATED FROM METALLIC GLASS

被引：0
|
作者：
Kanik, M. [1 ]
Bordeenithikasem, P. [1 ]
Schroers, J. [1 ]
Selden, N. [2 ]
Desai, A. [2 ]
Kim, D. [3 ]
M'Closkey, R. [3 ]
机构：
[1] Yale Univ, Sch Engn & Appl Sci, New Haven, CT 06520 USA
[2] Tanner Res, Los Angeles, CA USA
[3] Univ Calif Los Angeles, Samueli Sch Engn & Appl Sci, Los Angeles, CA USA
来源：
2014 1ST IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (ISISS 2014) | 2014年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel use of bulk metallic glasses in microresonator applications is reported and a method for the fabrication of ultra-smooth and highly symmetric three-dimensional wineglass structures with integrated electrode structures is presented. A shell with N=2 modes at 9.393 kHz and 9.401 kHz was characterized for both mounted and unmounted (to the electrode structure) conditions. Prior to mounting, the resonator was found to have quality factors of 7800 and 6500 for the two degenerate modes. After mounting, capacitive readout of the shell structure in both the time and frequency domain showed the resonances shifted to 9.461 kHz and 9.483 kHz respectively, for the N=2 modes increasing the frequency split by 15 Hz. The quality factor was also found to be reduced with values of 5400 and 5300 respectively. This investigation demonstrates that a device such as the one reported here promises robust platforms for complete MEMS inertial sensors with low cost and simplified fabrication.
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页码：9 / 12
页数：4
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