Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs

被引：7

作者：

Furukawa, Tadahiro ^{[1
]}

Koden, Mitsuhiro ^{[1
]}

机构：

[1] Yamagata Univ, Yonezawa, Yamagata 9920119, Japan

来源：

IEICE TRANSACTIONS ON ELECTRONICS | 2017年 / E100C卷 / 11期

关键词：

roll-to-roll; ITO; ultra-thin glass; OLED; flexible; photolithography-free;

D O I：

10.1587/transele.E100.C.949

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.

引用

页码：949 / 954

页数：6

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