Hydrodynamic model of a dielectric-barrier discharge in pure chlorine

被引:4
|
作者
Avtaeva, S. V. [1 ]
机构
[1] Novosibirsk State Univ, Novosibirsk 630090, Russia
关键词
RF GLOW-DISCHARGES; ELECTRON TEMPERATURES; OPTICAL-EMISSION; PLASMA; DIAGNOSTICS; CL-2; RADIOFREQUENCY; ION; SIMULATION; CL+;
D O I
10.1134/S1063780X17080037
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A one-dimensional hydrodynamic model of a dielectric-barrier discharge (DBD) in pure chlorine is developed, and the properties of the discharge are modeled. The discharge is excited in an 8-mm-long discharge gap between 2-mm-thick dielectric quartz layers covering metal electrodes. The DBD spatiotemporal characteristics at gas pressures of 15-100 Torr are modeled for the case in which a 100-kHz harmonic voltage with an amplitude of 8 kV is applied to the electrodes. The average power density deposited in the discharge over one voltage period is 2.5-5.8 W/cm(3). It is shown that ions and electrons absorb about 95 and 5% of the discharge power, respectively. In this case, from 67 to 97% of the power absorbed by electrons is spent on the dissociation and ionization of Cl-2 molecules. Two phases can be distinguished in the discharge dynamics: the active (multispike) phase, which follows the breakdown of the discharge gap, and the passive phase. The active phase is characterized by the presence of multiple current spikes, a relatively high current, small surface charge density on the dielectrics, and large voltage drop across the discharge gap. The passive phase (with no current spikes) is characterized by a low current, large surface charge density on the dielectrics, and small voltage drop across the discharge gap. The peak current density in the spikes at all pressures is about 4 mA/cm(2). In the multispike phase, there are distinct space charge sheaths with thicknesses of 1.5-1.8 mm and a mean electron energy of 4.3-7 eV and the central region of quasineutral plasma with a weak electric field and a mean electron energy of 0.8-3 eV. The degree of ionization of chlorine molecules in the discharge is similar to 0.02% at a pressure of 15 Torr and similar to 0.01% at 100 Torr. The DBD plasma is electronegative due to the fast attachment of electrons to chlorine atoms: e + Cl-2 -> Cl + Cl-. The most abundant charged particles are Cl-2(+) and Cl- ions, and the degree of ionization during current spikes in the active phase is (4.1-5.5) x 10(-7). The mechanism of discharge sustainment is analyzed. The appearance of a series of current spikes in the active phase of the discharge is explained.
引用
收藏
页码:876 / 890
页数:15
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