Calibration Issues for Nanoindentation Experiments: Direct Atomic Force Microscopy Measurements and Indirect Methods

被引：23

作者：

Barone, A. C. ^{[1
]}

Salerno, M. ^{[1
]}

Patra, N. ^{[1
,2
]}

Gastaldi, D. ^{[3
]}

Bertarelli, E. ^{[3
]}

Carnelli, D. ^{[3
]}

Vena, P. ^{[3
]}

机构：

[1] Italian Inst Technol, I-16163 Genoa, Italy

[2] Univ Genoa, I-16145 Genoa, Italy

[3] Politecn Milan, Dept Struct Engn, Lab Biol Struct Mech, I-20133 Milan, Italy

来源：

MICROSCOPY RESEARCH AND TECHNIQUE | 2010年 / 73卷 / 10期

关键词：

nanoindentation; AFM; machine compliance; diamond area function; Young modulus; hardness; ELASTIC-MODULUS; INDENTATION; HARDNESS; LOAD;

D O I：

10.1002/jemt.20850

中图分类号：

R602 [外科病理学、解剖学]; R32 [人体形态学];

学科分类号：

100101 ;

摘要：

This article discusses calibration issues for shallow depth nanoindentation experiments with Berkovich tips with respect to the accurate measurement of the diamond area function (DAF). For this purpose, two different calibration procedures are compared: (i) the direct measurement of the DAF through atomic force microscopy (AFM) imaging of the Berkovich tip at shallow depth and (ii) a novel indirect calibration method based on an iterative robust and converging scheme in which both reduced modulus and indentation hardness are simultaneously used. These results are obtained by indentation measurements on a standard specimen of fused silica, performed in the 0.5-200 mN load range with a Berkovich indenter. Direct tip shape measurements were carried out through different AFM methods. Comparisons with the standard indirect calibration procedure are also reported. For both the indirect calibration procedures a sensitivity and convergence study is presented. Microsc. Res. Tech. 73:996-1004, 2010. (C) 2010 Wile-Liss. Inc.

引用

页码：996 / 1004

页数：9

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