Low temperature synthesis of single crystalline silicon nanowires using anodic aluminum oxide template

Single crystalline slilicon nanowires (SiNWs) arrays were grown successfully on a silicon substrate by the chemical vapor deposition (CVD) process at a very low temperature of 400 degrees C. This was made possible by combined use of gold nanoparticles as catalyst and anodic aluminum oxide (AAO) as template. The AAO template was fabricated on the substrate with predeposited gold nanoparticles. Various analytical instruments were used to identify and discuss the growth mechanism and the structure of the SiNWs. The energy dispersive X-ray spectrometer (EDS) spectrum of a single SiNW shows existence of alumina in the gold metal tip. This clearly indicates participation of AAO in the metal tip to enhance the growth process. Further discussion on the measurement results for the crystalline structure of the SiNWs is presented.