Low temperature synthesis of single crystalline silicon nanowires using anodic aluminum oxide template

被引：0
|
作者：
Liu, Chien-Wei [1 ]
Kuo, Cheng-Yung [2 ]
Wang, Chuan-Po [2 ]
Shiau, Shiuan-Hua [2 ]
Gau, Chie [2 ]
Dai, Bau-Tong [1 ]
机构：
[1] National Nano Device Laboratories, Southern Region Center, Tainan 701, Taiwan
[2] National Cheng Kung University, Institute of Aeronautics and Astronautics, Center for Micro/Nano Science and Technology, Tainan 701, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 9 B期
关键词：
Single crystalline slilicon nanowires (SiNWs) arrays were grown successfully on a silicon substrate by the chemical vapor deposition (CVD) process at a very low temperature of 400 °C. This was made possible by combined use of gold nanoparticles as catalyst and anodic aluminum oxide (AAO) as template. The AAO template was fabricated on the substrate with predeposited gold nanoparticles. Various analytical instruments were used to identify and discuss the growth mechanism and the structure of the SiNWs. The energy dispersive X-ray spectrometer (EDS) spectrum of a single SiNW shows existence of alumina in the gold metal tip. This clearly indicates participation of AAO in the metal tip to enhance the growth process. Further discussion on the measurement results for the crystalline structure of the SiNWs is presented. © 2007 The Japan Society of Applied Physics;
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页码：6343 / 6345
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