Methods for determining and processing 3D errors and uncertainties for AFM data analysis

被引：42

作者：

Klapetek, P. ^{[1
]}

Necas, D. ^{[2
]}

Campbellova, A. ^{[1
]}

Yacoot, A. ^{[3
]}

Koenders, L. ^{[4
]}

机构：

[1] Czech Metrol Inst, Brno 63800, Czech Republic

[2] Masaryk Univ, Fac Sci, Dept Phys Elect, CS-61137 Brno, Czech Republic

[3] Natl Phys Lab, Teddington TW11 0LW, Middx, England

[4] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2011年 / 22卷 / 02期

关键词：

atomic force microscopy; 3D calibration; measurement uncertainty; CALIBRATION; MICROSCOPE; METROLOGY;

D O I：

10.1088/0957-0233/22/2/025501

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes the processing of three-dimensional (3D) scanning probe microscopy (SPM) data. It is shown that 3D volumetric calibration error and uncertainty data can be acquired for both metrological atomic force microscope systems and commercial SPMs. These data can be used within nearly all the standard SPM data processing algorithms to determine local values of uncertainty of the scanning system. If the error function of the scanning system is determined for the whole measurement volume of an SPM, it can be converted to yield local dimensional uncertainty values that can in turn be used for evaluation of uncertainties related to the acquired data and for further data processing applications (e.g. area, ACF, roughness) within direct or statistical measurements. These have been implemented in the software package Gwyddion.

引用

页数：10

共 50 条

[41] Visualisation of arteries and veins with 3D image processing methods
Smedby, O.
Acta Radiologica Supplementum, 2000, 41 (Suppl 422)
[42] 3D modeling from AFM measurements
Jost, T
Hügli, H
METROLOGY-BASED CONTROL FOR MICRO-MANUFACTURING, 2001, 4275 : 61 - 70
[43] Data correction methods for 3D light microscopy
Wang, CL
O'Connor, NJ
Wang, M
Turner, JN
Holmes, TJ
THREE-DIMENSIONAL AND MULTIDIMENSIONAL MICROSCOPY: IMAGE ACQUISITION AND PROCESSING V, PROCEEDINGS OF, 1998, 3261 : 93 - 107
[44] AUTOMATIC CONSTRUCTION OF GROUND MODELS FOR 3D FINITE ELEMENT ANALYSIS BY DATA PROCESSING
Tamura, Ayana
Takeyama, Tomohide
INTERNATIONAL JOURNAL OF GEOMATE, 2023, 24 (106): : 37 - 45
[45] Methods for detecting manipulations in 3D scan data
Ponto, Kevin
Smith, Simon
Tredinnick, Ross
DIGITAL INVESTIGATION, 2019, 30 : 101 - 107
[46] 3D genome mapping and analysis methods
Dostie, Josee
Blanchette, Mathieu
METHODS, 2018, 142 : 1 - 2
[47] Data Processing Methods for 3D Seismic Imaging of Subsurface Volcanoes: Applications to the Tarim Flood Basalt
Wang, Lei
Tian, Wei
Shi, Yongmin
JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 2017, (126):
[48] Optimization of CBCT data with image processing methods and production with fused deposition modeling 3D printing
Sayin, Hamdi
Aksoy, Bekir
oezsoy, Koray
MEDICAL & BIOLOGICAL ENGINEERING & COMPUTING, 2023,
[49] Reconstruction of 3D Pavement Texture on Handling Dropouts and Spikes Using Multiple Data Processing Methods
Dong, Niya
Prozzi, Jorge A.
Ni, Fujian
SENSORS, 2019, 19 (02):
[50] Methods for Quantifying and Characterizing Errors in Pixel-Based 3D Rendering
Hagedorn, John G.
Terrill, Judith E.
Peskin, Adele P.
Filliben, James J.
JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 2008, 113 (04) : 221 - 238

← 1 2 3 4 5 →