Effects of H2 in indium-molybdenum oxide films during high density plasma evaporation at room temperature

被引：15
|
作者：
Sun, SY
Huang, JL
Lii, DF
机构：
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan
[2] Cheng Shiu Univ, Dept Elect Engn, Kaohsiung 833, Taiwan
来源：
THIN SOLID FILMS | 2004年 / 469卷
关键词：
hydrogen; electrical properties and measurements; optical properties; evaporation;
D O I：
10.1016/j.tsf.2004.06.183
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Indium molybdenum oxide (IMO) films were made from an oxidized target with In2O3 and MoO3 in a weight proportion of 95:5 by using a high density plasma evaporation (HDPE). Hydrogen was added to the Ar+O-2 gas mixture during the preparation of the IMO films. With hydrogen, the decrease in the resistivity and the broadening of the process window was mainly due to an apparent increase in the mobility The transmittance in the visible spectral range of IMO films deteriorated with the incorporation of hydrogen. Mo+6/Mo+4 species, -OH fragment, metallic Mo and Mo-O oxides in the film were suggested to affect its electrical and optical properties. Applications as transparent and conducting films for opto-electronic and telecommunication devices would be expected in the near future. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：6 / 10
页数：5
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