Ultraviolet nanoimprint lithography applicable to thin-film transistor liquid-crystal display

被引：0
|
作者：
Lee, Eung-sug [1 ]
Jeong, Jun-ho [1 ]
Kim, Ki-don [1 ]
Choi, Dae-geun [1 ]
Choi, Jun-hyuk [1 ]
Lee, Dong-Il [1 ]
Altun, Ali Ozhan [1 ]
Lee, Soon-won [1 ]
机构：
[1] Korea Inst Machinery & Mat, Nanomech Syst Res Ctr, Taejon 305343, South Korea
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS | 2007年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：422 / 423
页数：2
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