Effects of hydrogen and hydrocarbon adsorption on the oxidation of Si(100) by atomic oxygen.

被引：0
|
作者：
Buntin, SA [1 ]
Litorja, M [1 ]
机构：
[1] Natl Inst Stand & Technol, Surface & Microanal Sci Div, Gaithersburg, MD 20899 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2001年 / 221卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
161-COLL
引用
收藏
页码：U332 / U332
页数：1
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