Effects of hydrogen and hydrocarbon adsorption on the oxidation of Si(100) by atomic oxygen.

被引：0

作者：

Buntin, SA ^{[1
]}

Litorja, M ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Surface & Microanal Sci Div, Gaithersburg, MD 20899 USA

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2001年 / 221卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

161-COLL

引用

页码：U332 / U332

页数：1

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