Two Dimensional Radiation Hydrodynamic Simulation for Extreme Ultra-Violet Emission from Laser-produced Tin Plasmas

被引：25
|
作者：
Sunahara, Atsushi [1 ]
Sasaki, Akira [1 ]
Nishihara, Katsunobu [1 ]
机构：
[1] Inst Laser Technol Japan, 2-6 Yamadaoka, Suita, Osaka 5650871, Japan
来源：
5TH INTERNATIONAL CONFERENCE ON INERTIAL FUSION SCIENCES AND APPLICATIONS (IFSA2007) | 2008年 / 112卷
关键词：
D O I：
10.1088/1742-6596/112/4/042048
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
We simulated Extreme Ultra-Violet (EUV) emission from laser-produced tin plasmas for the lithography of semi-conductor, using one-and two-dimensional radiation hydrodynamic simulation codes, and benchmarked the simulations by comparison with recent experiments. We successfully reproduced the measured conversion efficiency, x-ray spectra, plasma density profiles in the experimental conditions. This is the first example of benchmarking the radiation hydrodynamic simulation for the laser-produced tin (Sn) by comprehensive experimental observations. We found self-absorption of radiation due to the large opacity plays an important role in emission. Thus, the photo-excitation is included in our code to reproduce the experimental results.
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页数：4
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