A large-displacement and decoupled XYZ flexure parallel mechanism for micromanipulation

This paper studies the low-mobility XYZ flexure parallel mechanisms (FPM)s with decoupled kinematics structure, and enumerates the possible structures with consideration of actuation, manufacturing and available joints. A 3-PPP structure with the three decoupled translational motions and a workspace of more than 1 mm x 1 mm x 1 mm is designed as an example. Dimension optimization based on pseudo-rigid-body model is conducted. The experiments verify design of the proposed decoupled and large-displacement XYZ-FPM.