Extremely high Capacitance Ratio (C/R) by mems variable capacitor with Chameleon Actuators

被引：0

作者：

Nishiyama, Madoka ^{[1
]}

Konishil, Hiroshi ^{[1
]}

Suzuki, Junji ^{[1
]}

Tezuka, Yasuo ^{[1
]}

Suzuki, Yoshihiko ^{[1
]}

Suzuki, Kenichiro ^{[2
]}

机构：

[1] Nikon Inc, Core Technol Ctr, Kanagawa, Japan

[2] Ritsumeikan Univ, Coll Sci & Engn, Shiga, Japan

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

RF MEMS; variable capacitor; Capacitance Ratio; Chameleon Actuator; surface micromachining process;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we propose a novel variable capacitor having higher Capacitance Ratio (C/R) >35 than ever before. So far, various types of RF-MEMS variable capacitors have been proposed, but even the highest C/R among the capacitors under development is now the order of 4. For enabling the multi-band of the wireless terminal, it has been expected to achieve a device having higher C/R. We demonstrate by combining arbitrarily the quantity of the Chameleon Actuators and the area of capacitor plate, the capacitance value can be digitally controlled in a wide range.

引用

页数：2

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