Extremely high Capacitance Ratio (C/R) by mems variable capacitor with Chameleon Actuators

被引：0
|
作者：
Nishiyama, Madoka [1 ]
Konishil, Hiroshi [1 ]
Suzuki, Junji [1 ]
Tezuka, Yasuo [1 ]
Suzuki, Yoshihiko [1 ]
Suzuki, Kenichiro [2 ]
机构：
[1] Nikon Inc, Core Technol Ctr, Kanagawa, Japan
[2] Ritsumeikan Univ, Coll Sci & Engn, Shiga, Japan
来源：
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词：
RF MEMS; variable capacitor; Capacitance Ratio; Chameleon Actuator; surface micromachining process;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we propose a novel variable capacitor having higher Capacitance Ratio (C/R) >35 than ever before. So far, various types of RF-MEMS variable capacitors have been proposed, but even the highest C/R among the capacitors under development is now the order of 4. For enabling the multi-band of the wireless terminal, it has been expected to achieve a device having higher C/R. We demonstrate by combining arbitrarily the quantity of the Chameleon Actuators and the area of capacitor plate, the capacitance value can be digitally controlled in a wide range.
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页数：2
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