BI-AXIAL MAGNETICALLY ACTUATED TUNABLE PRISM

被引：0
|
作者：
Weber, Pascal M. [1 ]
Wapler, Matthias C. [1 ]
Lemke, Florian [1 ]
Wallrabe, Ulrike [1 ]
机构：
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microactuators, Georges Kohler Allee 102, D-79110 Freiburg, Germany
来源：
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2021年
关键词：
Tunable prism; bi-axial scanning; magnetic actuation; beam steering; transmissive optics;
D O I：
10.1109/TRANSDUCERS50396.2021.9495513
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we show the proof of concept for a magnetically actuated bi-axial tunable prism. Our modular design gives a high robustness and efficient fabrication. Even without optimizations, we achieved physical tilt angles of +/- 8 degrees to +/- 9,6 degrees and a response time of 14.4 ms for an aperture of 8 mm.
引用
收藏
页码：431 / 434
页数：4
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