Thermomechanical properties of polymer nanolithography using atomic force microscopy

被引：19
|
作者：
Fang, Te-Hua [1 ]
Wu, Cheng-Da [1 ]
Kang, Shao-Hui [1 ]
机构：
[1] Natl Kaohsiung Univ Appl Sci, Dept Mech Engn, Kaohsiung 807, Taiwan
来源：
MICRON | 2011年 / 42卷 / 05期
关键词：
Nanolithography; Polymer; Nanotribology; Friction; Nanoindentation; INDENTATION; MORPHOLOGY; ADHESION; STORAGE; FILMS;
D O I：
10.1016/j.micron.2011.01.010
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
The temperature-dependent mechanical properties of polyethylene terephthalate (PET) polymers are investigated using force-distance curves, adhesion force, and atomic force microscope (AFM) nanolithography combined the heating techniques. The results show that the width of grooves on the polymers at 20-60 degrees C were in the range of 14-363 nm. The wear depth of the polymers increased with increasing heating temperature. A volume of 251.85-2422.66 mu m(3) at a load of 30-50 nN with heating to 30-60 degrees C was removed, as compared to that of 26.60-70.30 mu m(3) obtained at room temperature. The contact forces of PET started increasing at 9 nN, whereas the size of the holes was average at a pressure. The results may be of importance in explaining the heating relationship among adhesion force, volume removal rate, and pressure. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码：492 / 497
页数：6
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