A THz Slotted-Waveguide Array Antenna Based on MEMS Technology

被引：0

作者：

Jiang, Mei ^{[1
]}

Lu, Xunxun ^{[1
]}

Xuan, Xiaobo ^{[1
]}

Han, Rubing ^{[1
]}

Wang, Min ^{[1
]}

机构：

[1] Shanghai Key Lab Electromagnet Environm Effects A, Shanghai 200438, Peoples R China

来源：

PROCEEDINGS OF THE 2018 IEEE 7TH ASIA-PACIFIC CONFERENCE ON ANTENNAS AND PROPAGATION (APCAP) | 2018年

基金：

上海市自然科学基金;

关键词：

THz; MEMS; slotted-waveguide array;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a slotted-waveguide array antenna based on MEMS (Micro Electro Mechanical Systems) processing is proposed for THz applications. The proposed antenna consists of a vertical waveguide transition and a center-fed eight -element slot array etching on the broadside of waveguide. The proposed antenna is constructed by fifth-layered silicon MEMS. Each layer is etched with slots and rectangular cavity by dry etching processing and stacked up by sputtering gold and gold -gold thermo-compression bonding. A prototype of the slottedwaveguide array antenna is simulated at 308GHz band. The simulation results exhibit a frequency bandwidth from 306GHz to 313GHz with Sii less than -10 dB, a maximum gain of 15.2dBi at 308.5GHz, and a I.dB gain bandwidth from 304GHz to 3 15GHz.

引用

页码：238 / 240

页数：3

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