A THz Slotted-Waveguide Array Antenna Based on MEMS Technology

被引：0
|
作者：
Jiang, Mei [1 ]
Lu, Xunxun [1 ]
Xuan, Xiaobo [1 ]
Han, Rubing [1 ]
Wang, Min [1 ]
机构：
[1] Shanghai Key Lab Electromagnet Environm Effects A, Shanghai 200438, Peoples R China
来源：
PROCEEDINGS OF THE 2018 IEEE 7TH ASIA-PACIFIC CONFERENCE ON ANTENNAS AND PROPAGATION (APCAP) | 2018年
基金：
上海市自然科学基金;
关键词：
THz; MEMS; slotted-waveguide array;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a slotted-waveguide array antenna based on MEMS (Micro Electro Mechanical Systems) processing is proposed for THz applications. The proposed antenna consists of a vertical waveguide transition and a center-fed eight -element slot array etching on the broadside of waveguide. The proposed antenna is constructed by fifth-layered silicon MEMS. Each layer is etched with slots and rectangular cavity by dry etching processing and stacked up by sputtering gold and gold -gold thermo-compression bonding. A prototype of the slottedwaveguide array antenna is simulated at 308GHz band. The simulation results exhibit a frequency bandwidth from 306GHz to 313GHz with Sii less than -10 dB, a maximum gain of 15.2dBi at 308.5GHz, and a I.dB gain bandwidth from 304GHz to 3 15GHz.
引用
收藏
页码：238 / 240
页数：3
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