The properties of antimony-doped tin oxide thin films by the sol-gel approach

被引：6
|
作者：
Zhao, L [1 ]
Zhang, DL [1 ]
Du, G [1 ]
Xu, JM [1 ]
Zhou, DX [1 ]
机构：
[1] Huazhong Univ Sci & Technol, MOE Engn Res Ctr Funct Ceram, Dept Elect Sci & Technol, Wuhan 430074, Hubei Province, Peoples R China
来源：
HIGH-PERFORMANCE CERAMICS III, PTS 1 AND 2 | 2005年 / 280-283卷
关键词：
thin films; sol-gel approach; antimony-doped tin oxide;
D O I：
10.4028/www.scientific.net/KEM.280-283.831
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Antimony-doped tin oxide thin films have a range of technical applications LS conductive coatings, and sol-gel processing seems to offer some advantages over other coating techniques. In this study, the sol was prepared by sol-gel approach from SnO2 H2O and SbCl3 in alcohol. It was found that the heat-treatment temperature and doping level have strong influences on the microstructure and composition of Sb: SnO2 films. The SnO2 crystals exist mainly as tetragonal rutile structure. The optimum heat-treatment temperature is about 450 similar to 500degreesC, and the film is composed with nanocrystals and nano-pores. Microstructure and the electrical behaviors of Sb-doped SnO2 thin films derived by sol-gel process were investigated.
引用
收藏
页码：831 / 834
页数：4
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