Real time optical method of stress measurements in thin films

被引:2
|
作者
Moulard, G [1 ]
Contoux, G [1 ]
Motyl, G [1 ]
Courbon, M [1 ]
机构
[1] IUT St Etienne, Lab Phys & Technol Vide, F-42023 St Etienne 2, France
来源
关键词
stress; intrinsic stress; cantilever; image processing;
D O I
10.4028/www.scientific.net/MSF.287-288.141
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Techniques generally used to measure stress in thin films cannot give sufficient information to be correlate to film properties. An in situ stress measurement method is described in this paper. This optical technique, based on the cantilever one, allows to follow up the evolution of intrinsic stress with film thickness. It provides complementary information which can be correlate with film microstructure. Moreover, after deposition, this technique determines the Young's modulus and thermal expansion coefficient of the film by measuring the thermal stress during cooling.
引用
收藏
页码:141 / 149
页数:9
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