共 50 条
- [31] Planarize the sidewall ripples of silicon deep reactive ion etching NSTI NANOTECH 2004, VOL 1, TECHNICAL PROCEEDINGS, 2004, : 473 - 476
- [33] Characterization of the microloading effect in deep reactive ion etching of silicon MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IX, 2004, 5342 : 111 - 118
- [34] Deep reactive ion etching characteristics of a macromachined chemical reactor JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (02): : 912 - 915
- [38] Silicon Deep Reactive Ion Etching with aluminum hard mask MATERIALS RESEARCH EXPRESS, 2019, 6 (08):