Automated, deep reactive ion etching free fiber coupling to nanophotonic devices

被引:2
|
作者
Flassig, Fabian [1 ,2 ]
Flaschmann, Rasmus [1 ,3 ]
Kainz, Thomas [1 ,2 ]
Ernst, Sven [1 ,2 ]
Strohauer, Stefan [1 ,2 ]
Schmid, Christian [1 ,3 ]
Zugliani, Lucio [1 ,3 ]
Mueller, Kai [1 ,3 ]
Finley, Jonathan J. [1 ,2 ]
机构
[1] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
[2] Tech Univ Munich, Phys Dept, D-85748 Garching, Germany
[3] Tech Univ Munich, Dept Elect & Comp Engn, D-85748 Garching, Germany
关键词
QD; Fiber coupling; Interconnection; Fiber-to-chip; SNSPD; SSPD; DRIE; QUANTUM KEY DISTRIBUTION; DETECTOR;
D O I
10.1117/12.2611160
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Rapid development in integrated optoelectronic devices and quantum photonic architectures creates a need for optical fiber to chip coupling with low losses. Here we present a fast and generic approach that allows temperature stable self-aligning connections of nanophotonic devices to optical fibers. We show that the attainable precision of our approach is equal to that of DRIE-process based couplings. Specifically, the initial alignment precision is 1.2 +/- 0.4 mu m, the average shift caused by mating < 0.5 mu m, which is in the order of the precision of the concentricity of the employed fiber, and the thermal cycling stability is < 0.2 mu m. From these values the expected overall alignment offset is calculated as 1.4 +/- 0.4 mu m. These results show that our process offers an easy to implement, versatile, robust and DRIE-free method for coupling photonic devices to optical fibers. It can be fully automated and is therefore scalable for coupling to novel devices for quantum photonic systems.
引用
收藏
页数:9
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