Research of microstructural characteristics on nanocrystalline diamond by microwave plasma CVD

被引：7

作者：

Hung, Jing-Ming ^{[2
,3
,4
]}

Lin, Li-Hsiang ^{[3
,4
,5
]}

Shih, Yung-Hsun ^{[2
,3
,4
,6
]}

Liu, Chung-Ming ^{[3
,4
,7
,8
]}

Cheng, Hsin-Chung ^{[2
,3
,4
,5
]}

Ou, Keng-Liang ^{[1
,3
,4
]}

机构：

[1] Taipei Med Univ, Grad Inst Biomed Mat & Engn, Taipei 110, Taiwan

[2] Taipei Med Univ, Sch Dent, Coll Oral Med, Taipei 110, Taiwan

[3] Taipei Med Univ, Res Ctr Biomed Devices, Taipei 110, Taiwan

[4] Taipei Med Univ, Res Ctr Biomed Implants & Microsurg Devices, Taipei 110, Taiwan

[5] Taipei Med Univ Hosp, Dept Dent, Taipei 110, Taiwan

[6] Taipei Med Univ, Dept Dent, Wan Fang Hosp, Taipei 110, Taiwan

[7] LungHwa Univ Sci & Technol, Grad Sch Engn Technol, Tao Yuan 306, Taiwan

[8] LungHwa Univ Sci & Technol, Dept Chem & Mat Engn, Tao Yuan 306, Taiwan

来源：

APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 13期

关键词：

Nanocrystalline diamond; Microwave plasma; Chemical vapor deposition; Microstructure; Wettability; AR/CH4/H-2; GAS-MIXTURES; ULTRANANOCRYSTALLINE DIAMOND; THIN-FILMS; RAMAN-SPECTRA; DEPOSITION; GROWTH;

D O I：

10.1016/j.apsusc.2010.12.134

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this study, the nanocrystalline diamond (NCD) films were carried out by microwave plasma chemical vapor deposition (CVD) with CH4/Ar/H-2 gas concoction on Si substrate at moderate temperatures. The characteristics of NCD films were evaluated using scanning electron microscopy, Raman spectroscopy, transmission electron microscopy, optical emission spectroscopy and optical contact angle meter. The analytical results revealed that C-2 radial was the dominant species in the deposited process. From TEM observation, the NCD films were formed via the etching of hydrocarbons and a small amount of H-2 content additive into gas mixture has improved the aggregation of the nucleation film to form the NCD films. The more hydrophobic surfaces imply that NCD films are the potential biomaterial in the application of article heart valve or stent. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：5508 / 5512

页数：5

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