Model-based Correction of Image Distortion in Scanning Electron Microscopy

被引：2
|
作者：
Gnieser, Dominic [1 ]
Frase, Carl Georg [2 ]
Bosse, Harald [2 ]
Tutsch, Rainer [1 ]
机构：
[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Prod Messtech, Schleinitzstr 20, D-38106 Braunschweig, Germany
[2] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
来源：
MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS IX | 2010年 / 437卷
关键词：
Monte Carlo Simulation; SEM; Micro- and Nano-metrology;
D O I：
10.4028/www.scientific.net/KEM.437.40
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors of image distortions are realized in the program, in respect of future photogrammetric evaluation. A first attempt for generating a 3D-analysis of simulated images is shown.
引用
收藏
页码：40 / +
页数：2
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