共 50 条
- [5] High temperature surface degradation of III-V nitrides JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 3523 - 3531
- [6] High temperature surface degradation of III-V nitrides Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1996, 14 (06):
- [7] High temperature surface degradation of III-V nitrides III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 569 - 574
- [8] High density plasma etching of III-V nitrides JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1011 - 1014
- [9] Etch processing of III-V nitrides MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, 1999, 4 : art. no. - G10.5
- [10] Process development for III-V nitrides MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1996, 38 (1-2): : 138 - 146