High pressure direct synthesis of III-V nitrides

被引:19
|
作者
Bockowski, M [1 ]
机构
[1] High Pressure Res Ctr, PL-01142 Warsaw, Poland
关键词
AlN; GaN; InN; combustion synthesis; crystal growth;
D O I
10.1016/S0921-4526(98)01300-3
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The nitrides of group III metals: (AIN, GaN, InN) are very important materials due to their applications for short wavelength optoelectronics (light-emitting diodes and laser diodes). In this paper, the results of high-pressure direct synthesis of AIN, GaN and InN are presented. The conditions for the thermodynamical stability for AIN, GaN and InN are discussed. The influence of the kinetic barrier on the synthesis of InN, GaN and AIN is considered using the results of quantum mechanical calculations of the dissociative adsorption of N-2 on the liquid metal surface. It is shown that the kinetic barrier for InN synthesis is very high, preventing direct synthesis of this compound. This barrier is lower for GaN, which allows to grow GaN crystals from the solution of atomic nitrogen in liquid gallium. The lowest barrier is for AlN, which leads to the combustion reaction of liquid aluminum in nitrogen atmosphere, in the pressure range from 10 to 650 MPa. At higher pressure, the extinction of combustion synthesis takes place. (C) 1999 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1 / 5
页数:5
相关论文
共 50 条
  • [1] HIGH-PRESSURE CRYSTALLIZATION OF III-V NITRIDES
    POROWSKI, S
    ACTA PHYSICA POLONICA A, 1995, 87 (02) : 295 - 302
  • [3] The application of high pressure in physics and technology of III-V nitrides
    Grzegory, I
    Krukowski, S
    Leszczynski, M
    Perlin, P
    Suski, T
    Porowski, S
    ACTA PHYSICA POLONICA A, 2001, 100 : 57 - 109
  • [4] Hydrogen in III-V nitrides
    Van de Walle, CG
    Johnson, NM
    GALLIUM NITRIDE (GAN) II, 1999, 57 : 157 - 184
  • [5] High temperature surface degradation of III-V nitrides
    Vartuli, CB
    Pearton, SJ
    Abernathy, CR
    MacKenzie, JD
    Lambers, ES
    Zolper, JC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 3523 - 3531
  • [6] High temperature surface degradation of III-V nitrides
    Vartuli, C.B.
    Pearton, S.J.
    Abernathy, C.R.
    MacKenzie, J.D.
    Lambers, E.S.
    Zolper, J.C.
    Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1996, 14 (06):
  • [7] High temperature surface degradation of III-V nitrides
    Vartuli, CB
    Pearton, SJ
    Abernathy, CR
    MacKenzie, JD
    Zolper, JC
    Lambers, ES
    III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 569 - 574
  • [8] High density plasma etching of III-V nitrides
    Vartuli, CB
    Pearton, SJ
    Abernathy, CR
    Shul, RJ
    Howard, AJ
    Kilcoyne, SP
    Parmeter, JE
    HagerottCrawford, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1011 - 1014
  • [9] Etch processing of III-V nitrides
    Eddy, CR
    MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, 1999, 4 : art. no. - G10.5
  • [10] Process development for III-V nitrides
    Pearton, SJ
    Abernathy, CR
    Ren, F
    Shul, RJ
    Kilcoyne, SP
    HagerottCrawford, M
    Zolper, JC
    Wilson, RG
    Schwartz, RG
    Zavada, JM
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1996, 38 (1-2): : 138 - 146