The Temperature Control of Laser Thermal Desorption System Based on Parameters Self-Tuning Fuzzy PID Algorithm

In view of the high-power laser could make the temperature rise on the samples, this paper proposes a controller based on parameters self-tuning fuzzy PID algorithm. The controller can be not only applied to the single control object based on Fuzzy empirical formula according to the PID parameters online correcting, but also can effectively deal with the temperature control model of LTDS uncertainly, nonlinear, time-varying, hysteresis, and so on. And in this paper, we make a simulation comparative experiment between the traditional PID control and the fuzzy adaptive PID control by using Matlab Simulink toolbox. The experiment result shows that fuzzy adaptive PID is better than the traditional control algorithm on overshoot, settling time and other performance indicators, and it can effectively improve control accuracy of the temperature control system.