Density functional theory study of new Cu(I)carbene compounds as prospective precursors for Cu ALD

被引：0
|
作者：
Dey, Gangotri [1 ]
Elliott, Simon D. [1 ]
机构：
[1] Tyndall Natl Inst, Cork 0000, Ireland
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2014年 / 248卷
关键词：
ATOMIC LAYER DEPOSITION; COPPER; THERMOLYSIS;
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
1049-INOR
引用
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页数：2
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