Nuclear microprobe analysis of beam-processed miniaturized structures by focused ion and electron beams

被引：0
|
作者：
Takai, M [1 ]
Yavas, O
Ochiai, C
Park, YK
机构：
[1] Osaka Univ, Res Ctr Mat Sci Extreme Condit, Toyonaka, Osaka 5608531, Japan
[2] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源：
MICROBEAM ANALYSIS 2000, PROCEEDINGS | 2000年 / 165期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：363 / 364
页数：2
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