Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity

被引：30

作者：

Ghafoor, Naureen ^{[1
]}

Eriksson, Fredrik ^{[1
]}

Gullikson, Eric ^{[2
]}

Hultman, Lars ^{[1
]}

Birch, Jens ^{[1
]}

机构：

[1] Linkoping Univ, IFM, Dept Phys Chem & Biol, SE-58183 Linkoping, Sweden

[2] Lawrence Berkeley Lab, Berkeley, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 09期

关键词：

D O I：

10.1063/1.2857459

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Soft x-ray reflectivity (SXR) of Cr/Sc multilayer with bilayer thickness of Lambda=1.56 nm was increased by 100% by an intentional introduction of nitrogen during magnetron sputtering. Multilayers deposited at background pressures of <= 2x10(-6) Torr exhibited amorphous layers with flat interfaces. At 2x10(-5) Torr, understoichiometric CrNx/ScNy multilayer with a nitrogen content of similar to 34 at. % was formed. CrNx/ScNy multilayer comprising of only 100 periods exhibited a SXR of 11.5%. X-ray and electron microscopy analyses showed that the improvement in performance is a result of reduced interfacial diffusion yielding interface widths of <= 0.29 nm. The CrNx/ScNy multilayer exhibited thermal stability up to >380 degrees C. (C) 2008 American Institute of Physics.

引用

页数：3

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