The effect of Cu content on the microstructures, mechanical and antibacterial properties of Cr-Cu-N nanocomposite coatings deposited by pulsed DC reactive magnetron sputtering

被引:46
|
作者
Kuo, Yu-Chu [1 ]
Lee, Jyh-Wei [2 ,3 ]
Wang, Chaur-Jeng [1 ,4 ]
Chang, Yu-Jie [5 ]
机构
[1] Tung Nan Inst Technol, Dept Mech Engn, Taipei, Taiwan
[2] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei, Taiwan
[3] Tung Nan Inst Technol, Res Ctr Micro Nanotechnol, Taipei, Taiwan
[4] Tung Nan Inst Technol, Inst Mechatron Engn, Taipei, Taiwan
[5] Tung Nan Inst Technol, Dept Safety Hlth & Environm Engn, Taipei, Taiwan
来源
SURFACE & COATINGS TECHNOLOGY | 2007年 / 202卷 / 4-7期
关键词
Cr-Cu-N thin film; pulsed DC reactive magnetron sputtering; nanoscratch; antibacterial properties;
D O I
10.1016/j.surfcoat.2007.05.062
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The nanocomposite Cr-Cu-N thin films with Cu content ranging from 1.6 to 24.3 at.% have been deposited by a bipolar asymmetric pulsed DC reactive magnetron sputtering system. A strong CrN (200) texture is found for each coating. The columnar structure was replaced by a dense and compact morphology when the coating contained more than 8.2 at.% Cu. An unusual hardness enhancement is observed on the coating with 15.7 at% Cu, which is possibly due to its grain refinement effect. For the coating containing 15.7 at.% Cu, a combination of high hardness, low coefficient of friction and good antibacterial properties are achieved. The Cr-Cu-N nanocomposite thin film developed in this study with sufficient hardness and antibacterial abilities can be used as a promising candidate to deposit on the surfaces of medical apparatus and food processing equipments. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:854 / 860
页数:7
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