Experimental Investigation of Thermally Induced Nonlinearities in Aluminum Nitride Contour-Mode MEMS Resonators

被引：22
|
作者：
Tazzoli, Augusto [1 ]
Rinaldi, Matteo [2 ]
Piazza, Gianluca [1 ,3 ]
机构：
[1] Univ Penn, Dept Elect & Syst Engn, Philadelphia, PA 19104 USA
[2] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA
[3] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
来源：
IEEE ELECTRON DEVICE LETTERS | 2012年 / 33卷 / 05期
关键词：
Aluminum nitride contour-mode resonator; MEMS; nonlinearity; self-heating;
D O I：
10.1109/LED.2012.2188491
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The aim of this letter is to experimentally demonstrate that the source of amplitude-frequency (A-f) nonlinearities in aluminum nitride contour-mode MEMS resonators is to be attributed to the softening of the equivalent device Young's modulus due to self-heating effects. Resonators with a center frequency of about 1.16 GHz are here investigated as a case study. The resonator self-heating was evaluated by integrating a platinum serpentine in the resonator body and using it as an efficient temperature sensor. The observations of this work are supported by the comparison of the shift of the A-f plots measured at different ambient temperatures with the direct recording of the resonator-temperature increase during VNA frequency sweeps.
引用
收藏
页码：724 / 726
页数：3
相关论文
共 50 条
  • [1] Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators
    Piazza, Gianluca
    Stephanou, Philip J.
    Pisano, Albert P.
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (06) : 1406 - 1418
  • [2] Nonlinear dynamics in aluminum nitride contour-mode resonators
    Miller, Nicholas
    Piazza, Gianluca
    [J]. APPLIED PHYSICS LETTERS, 2014, 104 (01)
  • [3] Aluminum nitride contour-mode vibrating RF MEMS
    Piazza, Gianluca
    Stephanou, Philip J.
    Pisano, Albert P.
    [J]. 2006 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-5, 2006, : 664 - 667
  • [4] A review: aluminum nitride MEMS contour-mode resonator
    Hou Yunhong
    Zhang Meng
    Han Guowei
    Si Chaowei
    Zhao Yongmei
    Ning Jin
    [J]. JOURNAL OF SEMICONDUCTORS, 2016, 37 (10)
  • [5] Nonlinear Dynamics in Aluminum Nitride Contour-Mode Resonators
    Miller, Nicholas
    Piazza, Gianluca
    [J]. 2013 JOINT EUROPEAN FREQUENCY AND TIME FORUM & INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2013, : 9 - 12
  • [6] A review: aluminum nitride MEMS contour-mode resonator
    侯云虹
    张萌
    韩国威
    司朝伟
    赵咏梅
    宁瑾
    [J]. Journal of Semiconductors, 2016, 37 (10) : 5 - 13
  • [7] Ovenized High Frequency Oscillators Based on Aluminum Nitride Contour-Mode MEMS Resonators
    Tazzoli, Augusto
    Rinaldi, Matteo
    Piazza, Gianluca
    [J]. 2011 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2011,
  • [8] Measurements of Frequency Fluctuations in Aluminum Nitride Contour-Mode Resonators
    Miller, Nicholas
    Piazza, Gianluca
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2014, 61 (06) : 913 - 919
  • [9] MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters
    Nordquist, Christopher D.
    Branch, Darren W.
    Pluym, Tammy
    Choi, Sukwon
    Nguyen, Janet H.
    Grine, Alejandro
    Dyck, Christopher W.
    Scott, Sean M.
    Sing, Molly N.
    Olsson, Roy H., III
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (10)
  • [10] Damping in Aluminum Nitride Contour Mode MEMS Resonators
    Segovia-Fernandez, Jeronimo
    [J]. 2017 IEEE 60TH INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS (MWSCAS), 2017, : 49 - 52
12345