An Investigation of the Cutting Strategy for the Machining of Polar Microstructures Used in Ultra-Precision Machining Optical Precision Measurement

被引:7
|
作者
Zhao, Chen-Yang [1 ,2 ]
Cheung, Chi-Fai [2 ]
Fu, Wen-Peng [1 ]
机构
[1] Harbin Inst Technol, Sch Mech Engn & Automat, Shenzhen 518055, Peoples R China
[2] Hong Kong Polytech Univ, Dept Ind & Syst Engn, Hong Kong 999077, Peoples R China
基金
中国国家自然科学基金;
关键词
polar microstructures; optimization; machining parameters; ultra-precision machining; cutting strategy; SPACE;
D O I
10.3390/mi12070755
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.
引用
收藏
页数:15
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