Prioritizing efforts to improve yield

被引：0
|
作者：
Mori, K [1 ]
Nguyen, N
Hsieh, SJ
机构：
[1] Sony Semicond Corp, San Antonio, TX 78245 USA
[2] Texas A&M Univ, College Stn, TX 77843 USA
来源：
INTERNATIONAL JOURNAL OF INDUSTRIAL ENGINEERING-THEORY APPLICATIONS AND PRACTICE | 2000年 / 7卷 / 04期
关键词：
microchip; yield improvement; contamination control; particles reduction; defects monitor; in-line inspection;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Contamination control is a major issue in semiconductor devices fabrication. While most production lines have a contamination monitoring system, the direct correlation between the detected defect level and device yield is not always obvious and therefore prioritizing quick yield improvement efforts can be difficult. This paper presents a solution for the problem, with a case study that confirmed the result of the proposed method.
引用
收藏
页码：275 / 280
页数：6
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