Optimal and Robust Design of a MEMS Gyroscope Based on Sensitivity Analysis and Worst-case Tolerance

被引：1
|
作者：
Zhou, Hao [1 ]
Su, Wei [1 ]
Tang, Hai-Lin [1 ]
机构：
[1] China Acad Engn Phys, Inst Elect Engn, Mianyang 621900, Peoples R China
来源：
2009 ASIA PACIFIC CONFERENCE ON POSTGRADUATE RESEARCH IN MICROELECTRONICS AND ELECTRONICS (PRIMEASIA 2009) | 2009年
关键词：
OPTIMIZATION; MICROGYROSCOPE;
D O I：
10.1109/PRIMEASIA.2009.5397441
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on an efficient robust optimal design of MEMS gyroscope. Proposed method uses sensitivity analysis considering the worst-case tolerance instead of statistical information about uncertainties. The robust optimal models based on macromodels consider electro-mechanical couple-field analysis. Monte Carlo analysis and physical level verification are also studied.
引用
收藏
页码：81 / 84
页数：4
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