Optimal and Robust Design of a MEMS Gyroscope Based on Sensitivity Analysis and Worst-case Tolerance

被引：1
|
作者：
Zhou, Hao [1 ]
Su, Wei [1 ]
Tang, Hai-Lin [1 ]
机构：
[1] China Acad Engn Phys, Inst Elect Engn, Mianyang 621900, Peoples R China
来源：
2009 ASIA PACIFIC CONFERENCE ON POSTGRADUATE RESEARCH IN MICROELECTRONICS AND ELECTRONICS (PRIMEASIA 2009) | 2009年
关键词：
OPTIMIZATION; MICROGYROSCOPE;
D O I：
10.1109/PRIMEASIA.2009.5397441
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on an efficient robust optimal design of MEMS gyroscope. Proposed method uses sensitivity analysis considering the worst-case tolerance instead of statistical information about uncertainties. The robust optimal models based on macromodels consider electro-mechanical couple-field analysis. Monte Carlo analysis and physical level verification are also studied.
引用
收藏
页码：81 / 84
页数：4
相关论文
共 50 条
  • [1] ROBUST OPTIMAL-DESIGN FOR WORST-CASE TOLERANCES
    EMCH, G
    PARKINSON, A
    [J]. JOURNAL OF MECHANICAL DESIGN, 1994, 116 (04) : 1019 - 1025
  • [2] Robust worst-case optimal investment
    Sascha Desmettre
    Ralf Korn
    Peter Ruckdeschel
    Frank Thomas Seifried
    [J]. OR Spectrum, 2015, 37 : 677 - 701
  • [3] Robust worst-case optimal investment
    Desmettre, Sascha
    Korn, Ralf
    Ruckdeschel, Peter
    Seifried, Frank Thomas
    [J]. OR SPECTRUM, 2015, 37 (03) : 677 - 701
  • [4] Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
    M. Mubasher Saleem
    Shafaat A. Bazaz
    [J]. Microsystem Technologies, 2011, 17 : 1381 - 1391
  • [5] Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
    Saleem, M. Mubasher
    Bazaz, Shafaat A.
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2011, 17 (08): : 1381 - 1391
  • [6] An evolutionary approach for worst-case tolerance design
    Tsai, Jinn-Tsong
    [J]. ENGINEERING APPLICATIONS OF ARTIFICIAL INTELLIGENCE, 2012, 25 (05) : 917 - 925
  • [7] Worst-case tolerance design by genetic algorithms
    Spagnuolo, G
    Vitelli, M
    [J]. ISIE 2002: PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS, VOLS 1-4, 2002, : 1178 - 1183
  • [8] Linear programming sensitivity measured by the optimal value worst-case analysis
    Hladik, Milan
    [J]. OPTIMIZATION METHODS & SOFTWARE, 2024, 39 (05): : 1168 - 1184
  • [9] The optimal loading of robust adaptive beamforming based on worst-case performance optimization
    Lin Jing-Ran
    Peng Qi-Cong
    [J]. 2006 6TH INTERNATIONAL CONFERENCE ON ITS TELECOMMUNICATIONS PROCEEDINGS, 2006, : 353 - +
  • [10] Design for reliability (DfR) in MEMS using worst-case methods
    Vudathu, Shyarn Praveen
    Lavu, Srikanth
    Laur, Rainer
    [J]. IPFA 2007: PROCEEDINGS OF THE 14TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS, 2007, : 267 - +
12345