Disk Resonator Gyroscope with Whole-Angle Mode Operation

被引：0

作者：

Taheri-Tehrani, Parsa ^{[1
]}

Izyumin, Oleg ^{[2
]}

Izyumin, Igor ^{[2
]}

Ahn, Chae H. ^{[3
]}

Ng, Eldwin J. ^{[3
]}

Hong, Vu A. ^{[3
]}

Yang, Yushi ^{[3
]}

Kenny, Thomas W. ^{[3
]}

Boser, Bernhard E. ^{[2
]}

Horsley, David A. ^{[1
]}

机构：

[1] Univ Calif Davis, Davis, CA 95616 USA

[2] Univ Calif Berkeley, Berkeley, CA 94720 USA

[3] Stanford Univ, Stanford, CA 94305 USA

来源：

2015 2ND IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (ISISS) | 2015年

关键词：

MEMS; Gyroscope; Rate integrating; Whole angle mode; Discrete-time control; Disk resonator; Quadrature;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a demonstration of a whole-angle mode operation of a 0.6 mm single-crystal silicon disk resonator gyroscope (DRG). This device has a Q factor of similar to 80,000 and a resonant frequency of similar to 250 kHz and is fabricated in the epi-seal process. Discrete-time control algorithms for rate-integrating gyro operation were implemented based on Lynch's algorithm. Despite the fact that this DRG is over 5 orders of magnitude smaller than the 58 mm HRG, the device's error sources are shown to be accurately modeled by the basic error models developed by Lynch.

引用

页码：9 / 12

页数：4

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