Electro-Optic Modulator Based on Photolithography Fabricated p-i-n Integrated Photonic Crystal Nanocavity

被引：8

作者：

Daud, Nurul Ashikin Binti ^{[1
]}

Ooka, Yuta ^{[1
]}

Tabata, Tomohisa ^{[1
]}

Tetsumoto, Tomohiro ^{[1
]}

Tanabe, Takasumi ^{[1
]}

机构：

[1] Keio Univ, Fac Sci & Technol, Dept Elect & Elect Engn, Yokohama, Kanagawa 2238522, Japan

来源：

IEICE TRANSACTIONS ON ELECTRONICS | 2017年 / E100C卷 / 08期

关键词：

photonic crystal; electro-optic devices; integrated optics; modulators; nanophotonics; opto-electronics; SILICON OPTICAL MODULATORS; CARRIER DEPLETION; WAVE-GUIDE;

D O I：

10.1587/transele.E100.C.670

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the first demonstration of an electro-optic modulator based on a photolithographically fabricated photonic crystal (PhC) nanocavity with a p-i-n junction with SiO2 cladding. We show that the device exhibits an ultrahigh quality factor (Q similar to 10(5)) and allow us to demonstrate electro-optic modulation through the integrated p-i-n diode structure. We demonstrate an electro-optic modulation based on the carrier injection.

引用

页码：670 / 674

页数：5

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