A temperature-compensated ZnO-on-diamond resonant mass sensor

This paper reports on the fabrication and measurement of ZnO-on-diamond length-extensional resonant mass sensors. Improved mass sensitivity due to the higher frequency of operation as well as lower motional impedance compared to capacitively-transduced sensors of the same type is demonstrated. Measured mass sensitivity of similar to 1kHz/pg is shown at similar to 39MHz operation frequency. Moreover, a small temperature coefficient of frequency (TCF) of -6ppm/degrees C is achieved by incorporating a layer of silicon dioxide in the resonator structure.