Nanoimprint patterning of thin cadmium stannate films using a polymeric precursor route

被引：18

作者：

Schumm, Benjamin ^{[1
]}

Wollmann, Philipp ^{[1
]}

Fritsch, Julia ^{[1
]}

Grothe, Julia ^{[1
]}

Kaskel, Stefan ^{[1
]}

机构：

[1] Tech Univ Dresden, Dept Inorgan Chem, D-01069 Dresden, Germany

来源：

JOURNAL OF MATERIALS CHEMISTRY | 2011年 / 21卷 / 29期

关键词：

TRANSPARENT CONDUCTING OXIDES; SOLAR-CELLS; IMPRINT LITHOGRAPHY; CD2SNO4; FILMS; DEVICES;

D O I：

10.1039/c1jm10886g

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The synthesis of cadmium stannate (Cd(2)SnO(4) CTO) nanoparticle powders and the deposition and patterning of thin Cd(2)SnO(4) films were achieved via a polymeric precursor approach. Conditions for the phase formation of the cubic spinel phase were evaluated, and for the first time the system was obtained in single phase powder form from a precursor system. Thin Cd(2)SnO(4) films were prepared by spin coating the polymeric precursor solution followed by thermal treatment. Highly transparent and 20 nm thick films with a minimum sheet resistance of 110 Ohm were prepared. A thermal imprint process with PDMS molds was used for patterning of the films in the sub-micrometre range. Nanostructured CTO films are essential to improve structured electrodes in opto-electronic devices such as CdTe-based thin film solar cells.

引用

页码：10697 / 10704

页数：8

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