New fully integrated 3-D silicon Hall sensor for precise angular-position measurements

被引：48

作者：

Burger, F ^{[1
]}

Besse, PA ^{[1
]}

Popovic, RS ^{[1
]}

机构：

[1] Swiss Federal Inst Technol, Inst Microsyst, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 67卷 / 1-3期

关键词：

magnetometers; integrated Hall sensors; angular position; compensation;

D O I：

10.1016/S0924-4247(97)01750-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A +/- 0.3 degrees precision in angular-position measurement over a 360 degrees rotation has been obtained with a novel fully integrated 3-D magnetic sensor. This low-field sensor, based on buried silicon Hall devices, combines two vertical Hall devices for the planar sensitivity and novel horizontal Hall elements for the orthogonal sensitivity. The advantages of this sensor are its very low cross-sensitivity and its remarkably high long-term stability. The X and Y directions are used as high-precision angular-position measurements and the third direction helps to compensate for mechanical misalignment. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：72 / 76

页数：5

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