A 3-D Hall Sensor for Precise Angular Position Measurements

被引：0
|
作者：
Dimitrov, Konstantin Veselinov [1 ]
机构：
[1] Bulgarian Acad Sci, Sensors & Microsyst Dept, Inst Control & Syst Res, POB 79, BU-1113 Sofia, Bulgaria
来源：
TURKISH JOURNAL OF PHYSICS | 2007年 / 31卷 / 02期
关键词：
Magnetometers; Integrated Hall sensors; Angular position; errors estimation;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A 3-D silicon Hall effect sensor for precise angular-position measurement over 360 degrees rotation is presented. This vector microtransducer functionally integrates into a common sensor region two parallel-field Hall devices for in-plane components of the magnetic field and one orthogonal Hall version for the perpendicular for the chip magnetic field. The advantages of this magnetometer are its low channel cross-sensitivities, remarkable simplified device design and high spatial resolution.
引用
收藏
页码：97 / 101
页数：5
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