Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering

被引:126
|
作者
Hwang, Dong Hyun [1 ]
Ahn, Jung Hoon [1 ]
Hui, Kwun Nam [1 ]
Hui, Kwan San [2 ]
Son, Young Guk [1 ]
机构
[1] Pusan Natl Univ, Sch Mat Sci & Engn, Pusan 609735, South Korea
[2] City Univ Hong Kong, Dept Syst Engn & Engn Management, Hong Kong, Peoples R China
来源
基金
新加坡国家研究基金会;
关键词
ZnS film; RF magnetron sputtering; solar cell; Cd-free buffer layer; CHEMICAL BATH DEPOSITION; BUFFER LAYER;
D O I
10.1186/1556-276X-7-26
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Zinc sulfide [ZnS] thin films were deposited on glass substrates using radio frequency magnetron sputtering. The substrate temperature was varied in the range of 100A degrees C to 400A degrees C. The structural and optical properties of ZnS thin films were characterized with X-ray diffraction [XRD], field emission scanning electron microscopy [FESEM], energy dispersive analysis of X-rays and UV-visible transmission spectra. The XRD analyses indicate that ZnS films have zinc blende structures with (111) preferential orientation, whereas the diffraction patterns sharpen with the increase in substrate temperatures. The FESEM data also reveal that the films have nano-size grains with a grain size of approximately 69 nm. The films grown at 350A degrees C exhibit a relatively high transmittance of 80% in the visible region, with an energy band gap of 3.79 eV. These results show that ZnS films are suitable for use as the buffer layer of the Cu(In, Ga)Se-2 solar cells.
引用
收藏
页码:1 / 7
页数:7
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