Solubility of carbon dioxide and cosolvents in a photoresist polymer

被引：2

作者：

Balashova, Ida M. ^{[1
]}

Russell, Marc C. ^{[1
]}

Danner, Ronald P. ^{[1
]}

Duda, J. Larry ^{[1
]}

机构：

[1] Penn State Univ, Dept Chem Engn, Ctr Study Polymer Syst, University Pk, PA 16802 USA

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 2008年 / 108卷 / 03期

关键词：

diffusion; photoresists; swelling;

D O I：

10.1002/app.27849

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

Solubility and diffusivity of cosolvents and carbon dioxide in a photoresist polymer have been measured below the glass transition temperature by the inverse gas chromatography and static capsule methods over a temperature range of 75-100 degrees C and pressures up to 7000 kPa. The results showed that presence of even low pressures of CO2 increased the solubility and diffusivity of the cosolvents studied. Experiments in which exposure of the polymer to CO2 was cycled on and off indicated that the free volume introduced by the CO2 persisted in the polymer for a significant time after removal of the CO2. (c) 2008 Wiley Periodicals, Inc.

引用

页码：1865 / 1870

页数：6

共 50 条

[21] Solubility of the silver nitrate in supercritical carbon dioxide with ethanol and ethylene glycol as double cosolvents: Experimental determination and correlation
Ren, Hongrui
Song, Jibin
Xu, Qinqin
Yin, Jianzhong
[J]. CHINESE JOURNAL OF CHEMICAL ENGINEERING, 2019, 27 (02) : 400 - 404
[22] Solubility of the silver nitrate in supercritical carbon dioxide with ethanol and ethylene glycol as double cosolvents: Experimental determination and correlation
Hongrui Ren
Jibin Song
Qinqin Xu
Jianzhong Yin
[J]. Chinese Journal of Chemical Engineering, 2019, 27 (02) : 400 - 404
[23] SUPERCRITICAL CARBON-DIOXIDE EXTRACTION OF COTTONSEED WITH COSOLVENTS
KUK, MS
HRON, RJ
[J]. JOURNAL OF THE AMERICAN OIL CHEMISTS SOCIETY, 1994, 71 (12) : 1353 - 1356
[24] Corrosive effects of supercritical carbon dioxide and cosolvents on metals
Russick, EM
Poulter, GA
Adkins, CLJ
Sorensen, NR
[J]. JOURNAL OF SUPERCRITICAL FLUIDS, 1996, 9 (01): : 43 - 50
[25] Solubility of carbon dioxide in a natural biodegradable polymer: Determination of diffusion coefficients
Cravo, Carlos
Duarte, Ana Rita C.
Duarte, Catarina M. M.
[J]. JOURNAL OF SUPERCRITICAL FLUIDS, 2007, 40 (02): : 194 - 199
[26] DIFFUSIVITY AND SOLUBILITY OF CARBON-DIOXIDE IN DILUTED POLYMER-SOLUTIONS
LOHSE, M
ALPER, E
QUICKER, G
DECKWER, WD
[J]. AICHE JOURNAL, 1981, 27 (04) : 626 - 631
[27] Solubility, extraction and modification of polymers and polymer additives in supercritical carbon dioxide
Merz, L
Muth, O
[J]. HIGH PRESSURE CHEMICAL ENGINEERING, 1996, 12 : 373 - 378
[28] Prediction of solid solute solubility in supercritical carbon dioxide with organic cosolvents from the PR plus COSMOSAC equation of state
Ting, Yi-Shiu
Hsieh, Chieh-Ming
[J]. FLUID PHASE EQUILIBRIA, 2017, 431 : 48 - 57
[29] Sorption and Diffusion of Supercritical Carbon Dioxide into Nitrocellulose with or without Cosolvents
Sun, Meiling
Ying, Sanjiu
[J]. POLYMER-PLASTICS TECHNOLOGY AND ENGINEERING, 2012, 51 (13) : 1346 - 1350
[30] Designing photoresist systems for microlithography in carbon dioxide
Flowers, D
Hoggan, E
DeSimone, JM
Carbonell, R
[J]. NANOPATTERNING-FROM ULTRALARGE-SCALE INTERGRATION TO BIOTECHNOLOGY, 2002, 705 : 81 - 87

← 1 2 3 4 5 →