[1] Shenzhen Univ, Nanophoton Res Ctr, Shenzhen Key Lab Microscale Opt Informat Technol, Shenzhen 518060, Peoples R China
[2] Australian Natl Fabricat Facil, Melbourne Ctr Nanofabricat, Clayton, Vic 3168, Australia
[3] RMIT Univ, Sch Engn, Melbourne, Vic 3001, Australia
[4] Delft Univ Technol, Opt Res Grp, Lorentzweg 1, NL-2628 CJ Delft, Netherlands