[1] Forschungszentrum Julich, Helmholtz Inst Erlangen Nurnberg Renewable Energy, D-91058 Erlangen, Germany
[2] Friedrich Alexander Univ Erlangen Nurnberg, Dept Chem & Biol Engn, Erlangen, Germany
[3] Univ Freiburg, IMTEK Dept Microsyst Engn, Lab MEMS Applicat, Freiburg, Germany