Interaction of UHF-plasma with electron-cyclotron resonance on electrophysical properties of diamond-like carbon films

被引：0
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作者：
Bylinkina, NN
Mushtakova, SP
Oleinik, VA
Skripal, AV
Usanov, DA
Ushakov, NM
Yafarov, RK
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PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1996年 / 22卷 / 06期
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O59 [应用物理学];
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页码：43 / 47
页数：5
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