Spectral effects of dual wavelength low coherence light source in white light interferometry

被引:12
|
作者
Chong, Wee Keat [1 ]
Li, Xiang [1 ]
Soh, Yeng Chai [2 ]
机构
[1] Singapore Inst Mfg Technol, Precis Measurement Grp, Singapore 638075, Singapore
[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词
Vertical scanning interferometry; Hybrid light source; LED; Fringe contrast function; Spectral manipulation; FRINGE-PATTERN-ANALYSIS;
D O I
10.1016/j.optlaseng.2012.12.014
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The spectral property of some modern (or hybrid) low coherent light source introduces distinctive feature to the interference signal of white light interferometry. The distinctive feature is defined as discontinuities which make the fringe contrast function (which is the envelope of the interference signal) unable to be modeled as a single Gaussian function. In this paper, we investigate the spectral effect of dual wavelength low coherence light source in white light interferometry and identify the distinctive feature as the result of destructive interference within the localized window where the optical path difference (OPD) is small. By doing so, we give a theoretical explanation of the distinctive feature and demonstrate that the fringe contrast function (and the location of the distinctive feature) can be manipulated by spectrum shaping. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:651 / 655
页数:5
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