The CantiClever: a dedicated probe for magnetic force microscopy

被引：11
|
作者：
van den Bos, A [1 ]
Heskamp, I [1 ]
Siekman, M [1 ]
Abelmann, L [1 ]
Lodder, C [1 ]
机构：
[1] Univ Twente, MESA Res Inst, Syst & Mat Informat Storage Grp, NL-7500 AE Enschede, Netherlands
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2002年 / 38卷 / 05期
关键词：
cantilevers; integration; magnetic force microscopy (MFM); magnetic tips;
D O I：
10.1109/TMAG.2002.803585
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.
引用
收藏
页码：2441 / 2443
页数：3
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